Title:
EXPOSURE DEVICE, METHOD FOR PRODUCING FLAT PANEL DISPLAY, METHOD FOR PRODUCING DEVICE, AND EXPOSURE METHOD
Document Type and Number:
WIPO Patent Application WO/2016/159295
Kind Code:
A1
Abstract:
A liquid crystal exposure device (10) irradiates a substrate (P) with light (IL) from an illumination system (20) via a projection optical system (40), and performs scanning exposure by driving the illumination system (20) and projection optical system (40) in a scanning direction with respect to the substrate (P), forming a predetermined pattern on the substrate (P), is equipped with an acquisition unit that acquires information pertaining to the position for driving the illumination system (20) and projection optical system (40) in the scanning direction, and a control system that controls the projection optical system (40) so as to maintain, within a predetermined range, the variation in the positions of the illumination system (20) and projection optical system (40) on the basis of information, during scanning exposure.
Inventors:
NAITO KAZUO (JP)
AOKI YASUO (JP)
NAGASHIMA MASAYUKI (JP)
AOKI YASUO (JP)
NAGASHIMA MASAYUKI (JP)
Application Number:
PCT/JP2016/060787
Publication Date:
October 06, 2016
Filing Date:
March 31, 2016
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G03F9/00; G02F1/13; G03F7/20
Foreign References:
| JP2013200506A | 2013-10-03 | |||
| JP2013242488A | 2013-12-05 | |||
| JP2012058388A | 2012-03-22 | |||
| JP2008176257A | 2008-07-31 | |||
| JPH09244255A | 1997-09-19 |
Attorney, Agent or Firm:
TATEISHI, Atsuji (JP)
Tokuji Tateishi (JP)
Tokuji Tateishi (JP)
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