EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

Title:

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

Document Type and Number:

WIPO Patent Application WO/2015/166524

Kind Code:

A1

Abstract:

This extreme ultraviolet light generation apparatus may include: a target supply unit that supplies a target from a nozzle; a first illuminating apparatus, which outputs light having first characteristics, and which illuminates the target outputted from the nozzle; a second illuminating apparatus, which outputs light having second characteristics that are different from the first characteristics, and which illuminates the target outputted from the nozzle; a first image pickup apparatus that photographs the target illuminated with the light having the first characteristics; and a second image pickup apparatus that photographs the target illuminated with the light having the second characteristics.

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Inventors:

IMACHI NAOYOSHI (JP)
WAKABAYASHI OSAMU (JP)

Application Number:

PCT/JP2014/061815

Publication Date:

November 05, 2015

Filing Date:

April 28, 2014

Export Citation:

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Assignee:

GIGAPHOTON INC (JP)

International Classes:

H01L21/027; H05G2/00

Domestic Patent References:

WO2013161760A1

2013-10-31

Foreign References:

JP2004303725A	2004-10-28
JP2006128157A	2006-05-18
JP2010103499A	2010-05-06
JP2005310453A	2005-11-04

Attorney, Agent or Firm:

TOU-OU PATENT FIRM (JP)
Patent business corporation 藤央特許事務所 (JP)

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