Title:
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND MAINTENANCE METHOD
Document Type and Number:
WIPO Patent Application WO/2019/035165
Kind Code:
A1
Abstract:
An extreme ultraviolet light generation device of one aspect of the present disclosure, comprises: an optical base; and a chamber module configured to be interchangeable with respect to the optical base. The chamber module includes: a chamber in which extreme ultraviolet light is generated; a light condensing mirror that is disposed inside the chamber and condenses the extreme ultraviolet light generated inside the chamber; a window for allowing laser light that has been introduced to the optical base to pass to the inside of the chamber, and that has a function of sealing the chamber in an airtight state; and a laser light condensing optical system for condensing the laser light that has passed through the window.
Inventors:
WAKANA KATSUHIKO (JP)
Application Number:
PCT/JP2017/029295
Publication Date:
February 21, 2019
Filing Date:
August 14, 2017
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H05G2/00
Foreign References:
| JP2013069655A | 2013-04-18 | |||
| JP2017097375A | 2017-06-01 | |||
| JP2011029587A | 2011-02-10 | |||
| JP2010080941A | 2010-04-08 | |||
| JP2008034480A | 2008-02-14 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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