Title:
EXTREME ULTRAVIOLET LIGHT SENSOR UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/229838
Kind Code:
A1
Abstract:
The extreme ultraviolet light sensor unit relating to one aspect of the present disclosure is provided with: a mirror that reflects extreme ultraviolet light; a wavelength filter that selectively passes extreme ultraviolet light reflected by the mirror; a light sensor that detects extreme ultraviolet light passed through the wavelength filter; and a purge gas supply unit that is disposed so as to supply a purge gas between the wavelength filter and the light sensor.
Inventors:
MIYASHITA KOTARO (JP)
Application Number:
PCT/JP2017/021678
Publication Date:
December 20, 2018
Filing Date:
June 12, 2017
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H05G2/00
Foreign References:
| JP2012119099A | 2012-06-21 | |||
| JP2007109451A | 2007-04-26 | |||
| JPH1161081A | 1999-03-05 | |||
| JP2010147138A | 2010-07-01 | |||
| JP2005069854A | 2005-03-17 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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