Title:
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/038921
Kind Code:
A1
Abstract:
This extreme ultraviolet light source device is provided with: a light source unit that generates plasma for emitting extreme ultraviolet light; a vacuum cabinet disposed between a utilization device by which the extreme ultraviolet light is utilized and the light source unit; a debris trap that is disposed within the vacuum cabinet, and diverts the traveling direction of debris diffused from the plasma to the utilization device from the ray direction of the extreme ultraviolet light; a heat-blocking plate structure disposed within the vacuum cabinet and disposed between the plasma and the debris trap; and a cooling mechanism that cools the heat-blocking plate structure. The heat-blocking plate structure has a first heat-blocking plate and a second heat-blocking plate that overlaps the first heat-blocking plate with a space therebetween. The second heat-blocking plate is disposed between the first heat-blocking plate and the plasma. The first heat-blocking plate is cooled by the cooling mechanism.
Inventors:
ASHIZAWA NORITAKA (JP)
YABUTA HIRONOBU (JP)
YABUTA HIRONOBU (JP)
Application Number:
PCT/JP2021/025928
Publication Date:
February 24, 2022
Filing Date:
July 09, 2021
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
H05H1/24; G03F7/20; H05G2/00
Foreign References:
| JP2015149186A | 2015-08-20 | |||
| JP2004214656A | 2004-07-29 | |||
| JP2014154271A | 2014-08-25 | |||
| JP2009518853A | 2009-05-07 | |||
| JP2007005542A | 2007-01-11 | |||
| JP2017219698A | 2017-12-14 |
Other References:
See also references of EP 4178322A4
Attorney, Agent or Firm:
KONISHI Kay et al. (JP)
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