Title:
FEED GAS SUPPLY SYSTEM AND FEED GAS SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2021/054216
Kind Code:
A1
Abstract:
A feed gas supply system for supplying a feed gas generated by vaporizing a solid feedstock to a processing device, comprising: a vaporizing device that vaporizes the solid feedstock to generate the feed gas; a delivery mechanism for delivering a dispersion, in which the solid feedstock is dispersed in a liquid, from a storage vessel for storing the dispersion to the vaporizing device; and a separation mechanism for separating the solid feedstock from the dispersion in the vaporizing device.
Inventors:
OKABE TSUNEYUKI (JP)
OKURA SHIGEYUKI (JP)
KOMORI EIICHI (JP)
OKURA SHIGEYUKI (JP)
KOMORI EIICHI (JP)
Application Number:
PCT/JP2020/034087
Publication Date:
March 25, 2021
Filing Date:
September 09, 2020
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
C23C16/448; B01J4/00; B01J7/00
Foreign References:
| JP2005533179A | 2005-11-04 | |||
| JP2019039022A | 2019-03-14 | |||
| JP2012240020A | 2012-12-10 | |||
| JP2006225147A | 2006-08-31 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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