Title:
FIELD EMISSION APPARATUS AND HAND-HELD NONDESTRUCTIVE INSPECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2012/063379
Kind Code:
A1
Abstract:
In the present invention, heat dissipation is improved by extending the creeping distance in a vacuum vessel according to the size of a flange part, without lengthening the vacuum vessel in the direction in which an electron beam is emitted. A vacuum vessel (20) in which a flange portion (20a) having a hollow portion between a cold cathode (9) and an anode (11) is formed is used. One example is a vacuum vessel (20) in which a cold cathode vessel (21) and an anode vessel (22), both cylindrically shaped, are communicated with each other and a hollow flange portion (20a) is formed between the vessels (21, 22). A focusing electrode (14) and a getter material (15), for example, are disposed in the hollow portion of the flange portion (20a). A cold cathode (9) which has a guard electrode on the outer side of the periphery of a carbon film structure (10) formed on a substrate (7) may be used. The carbon film structure (10) may be formed in the middle of an electrode surface of the substrate (7).
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Inventors:
ISHIGURO YOSHIHISA (JP)
HABA MASANORI (JP)
HABA MASANORI (JP)
Application Number:
PCT/JP2011/003242
Publication Date:
May 18, 2012
Filing Date:
June 08, 2011
Export Citation:
Assignee:
LIFE TECHNOLOGY RES INST INC (JP)
ISHIGURO YOSHIHISA (JP)
HABA MASANORI (JP)
ISHIGURO YOSHIHISA (JP)
HABA MASANORI (JP)
International Classes:
H01J5/02; G21K5/00; G21K5/02; H01J1/46; H01J7/24; H01J35/16; H05G1/04
Domestic Patent References:
| WO2010150438A1 | 2010-12-29 |
Foreign References:
| JP2005032638A | 2005-02-03 | |||
| JPS5539104A | 1980-03-18 | |||
| JPS56137358U | 1981-10-17 | |||
| JP2010056062A | 2010-03-11 | |||
| JPS6097531A | 1985-05-31 | |||
| JP2002299098A | 2002-10-11 | |||
| JPS61140041A | 1986-06-27 | |||
| JPS5844662A | 1983-03-15 | |||
| JPH04132147A | 1992-05-06 | |||
| JP2008218053A | 2008-09-18 | |||
| JP2011119084A | 2011-06-16 | |||
| JP2008150253A | 2008-07-03 | |||
| JP2008150682A | 2008-07-03 | |||
| JP2010056062A | 2010-03-11 | |||
| JPH0574394B2 | 1993-10-18 | |||
| JP2006066075A | 2006-03-09 | |||
| JP2002093307A | 2002-03-29 |
Other References:
See also references of EP 2642505A4
Attorney, Agent or Firm:
KOYAMA, YUU (JP)
Hill 有 (JP)
Hill 有 (JP)
Download PDF:
Claims:
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