Title:
FILM FORMING DEVICE, DETECTION DEVICE, AND METHOD FOR CONTROLLING FILM FORMING DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/075377
Kind Code:
A1
Abstract:
According to the present invention, a film forming device for performing film formation on a substrate is used, the device comprising: an electrostatic chuck having a suction surface for suctioning a substrate; and a detection means for detecting the state of the suction surface on which no substrate is suctioned.
Inventors:
KAWAE MEGUMU (JP)
Application Number:
PCT/JP2023/028070
Publication Date:
April 11, 2024
Filing Date:
August 01, 2023
Export Citation:
Assignee:
CANON TOKKI CORP (JP)
International Classes:
H01L21/683; C23C14/50; C23C14/54; H05B33/10; H10K50/10
Foreign References:
| JP2021022740A | 2021-02-18 | |||
| JPH0890474A | 1996-04-09 | |||
| JPH06334024A | 1994-12-02 | |||
| JP2016200480A | 2016-12-01 | |||
| US20200058536A1 | 2020-02-20 | |||
| US20140064905A1 | 2014-03-06 | |||
| JP2000228440A | 2000-08-15 | |||
| JPH0954130A | 1997-02-25 | |||
| JP2022131529A | 2022-09-07 | |||
| JP2011515856A | 2011-05-19 |
Attorney, Agent or Firm:
IP FIRM SHUWA (JP)
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