Title:
FILM STRUCTURE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2018/216227
Kind Code:
A1
Abstract:
Provided is a film structure having a conductive film formed on a substrate and a piezoelectric film formed on the conductive film, wherein the piezoelectric constant of the piezoelectric film can be increased. A method for manufacturing a film structure according to the present invention has steps for: forming, on a substrate 11, a conductive film 13 containing platinum that has a cubic crystal structure and that is (100)-oriented; applying heat treatment to the conductive film 13 at a temperature of 450-600°C; and then forming a film 15 containing a second composite oxide represented by Pb(Zr1−yTiy)O3, with a film 14 containing a first composite oxide represented by Sr(Ti1−xRux)O3 interposed therebetween. x satisfies 0 ≤ x ≤ 1, and y satisfies 0 ≤ y ≤ 0.1.
Inventors:
KIJIMA TAKESHI (JP)
Application Number:
PCT/JP2017/020527
Publication Date:
November 29, 2018
Filing Date:
May 26, 2017
Export Citation:
Assignee:
ADVANCED MATERIAL TECH INC (JP)
International Classes:
H01L41/319; H01L21/316; H01L41/187; H01L41/316; H01L41/317; H01L41/43
Domestic Patent References:
| WO2015072095A1 | 2015-05-21 |
Foreign References:
| JP2016042505A | 2016-03-31 | |||
| JP2010232580A | 2010-10-14 | |||
| JP2008218620A | 2008-09-18 | |||
| JP2013168530A | 2013-08-29 | |||
| JP2017059751A | 2017-03-23 |
Attorney, Agent or Firm:
YANASE Mutsuyasu et al. (JP)
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