Title:
FILTER, BULK ACOUSTIC WAVE RESONATOR ASSEMBLY AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/213402
Kind Code:
A1
Abstract:
Provided is a filter, comprising: a plurality of serial resonators, and a plurality of parallel resonators, wherein each resonator comprises a substrate (101), an acoustic mirror (103), a bottom electrode (102), a top electrode (106), and a piezoelectric layer (104). The top electrode (106) of at least one serial resonator and the top electrode (106) of at least one parallel resonator have or are provided with raised portions respectively at a connecting end of the top electrode (106) and a connecting end of a non-top electrode, and the top surface of the raised portion is beyond the top surface of an inner side portion of the top electrode (106). Each resonator having the raised portion comprises a conductive layer which is in contact with the corresponding electrode in the thickness direction of the resonator, wherein the conductive layer enables the raised portion to be beyond the top surface of the inner side portion of the top electrode (106), and the thickness of the conductive layer of the at least one serial resonator is greater than the thickness of the conductive layer of the at least one parallel resonator. Moreover, the present application further relates to a bulk acoustic wave resonator assembly and a method for manufacturing the bulk acoustic wave resonator assembly.
Inventors:
XU YANG (CN)
PANG WEI (CN)
HAO LONG (CN)
PANG WEI (CN)
HAO LONG (CN)
Application Number:
PCT/CN2021/088485
Publication Date:
October 28, 2021
Filing Date:
April 20, 2021
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H3/02; H03H9/02; H03H9/17
Domestic Patent References:
| WO2020015904A1 | 2020-01-23 |
Foreign References:
| CN111600566A | 2020-08-28 | |||
| CN103281050A | 2013-09-04 | |||
| CN109889179A | 2019-06-14 | |||
| CN111010116A | 2020-04-14 | |||
| CN110061712A | 2019-07-26 | |||
| US20140354115A1 | 2014-12-04 |
Other References:
See also references of EP 4142152A4
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
Download PDF: