Title:
FILTER FOR CAPTURING FINE PARTICLES AND METHOD FOR MANUFACTURING FILTER FOR CAPTURING FINE PARTICLES
Document Type and Number:
WIPO Patent Application WO/2022/209115
Kind Code:
A1
Abstract:
A filter for capturing fine particles, the filter having: a transparent body having first and second surfaces, and a thickness of 50 μm or more; and, a plurality of through-holes that penetrate from the first surface of the body to the second surface. When a position 10 μm in depth from the second surface is defined as a reference depth DS and, in each through-hole, the minimum cross-sectional dimension at the reference depth DS is φP and the minimum cross-sectional dimension between the reference depth DS and the second surface is φQ, φQ ≦ 0.6 μm and φQ / φP ≦ 0.5.
Inventors:
IWATA DAIJIRO (JP)
MASHIMO TAKAHIRO (JP)
TATSUKOSHI KENTARO (JP)
ODAKA HIDEFUMI (JP)
MASHIMO TAKAHIRO (JP)
TATSUKOSHI KENTARO (JP)
ODAKA HIDEFUMI (JP)
Application Number:
PCT/JP2022/000434
Publication Date:
October 06, 2022
Filing Date:
January 07, 2022
Export Citation:
Assignee:
AGC INC (JP)
International Classes:
B01D39/20; B01D39/16; B23K26/382; C03B33/09
Foreign References:
JP2014147893A | 2014-08-21 | |||
JPH0243927A | 1990-02-14 | |||
JP2003526497A | 2003-09-09 | |||
JP2013215668A | 2013-10-24 | |||
JP2007508141A | 2007-04-05 | |||
US6295986B1 | 2001-10-02 | |||
CN108079665A | 2018-05-29 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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