Title:
FILTRATION FILTER
Document Type and Number:
WIPO Patent Application WO/2013/151147
Kind Code:
A1
Abstract:
Provided is a filtration filter whereby a reduction in filtration efficiency can be prevented. A filtration filter (10) is provided with a filter main body (11) comprising a porous ceramic body formed by sintering numerous grains (15) with each other, six drain channels (14) formed parallel to each other through the filter main body (11) in the longitudinal direction thereof, and a filtration channel (16) configured from spaces between the grains (15), a surface of the filter main body (11) being covered by a DLC film.
Inventors:
MORIYA TSUYOSHI (JP)
Application Number:
PCT/JP2013/060409
Publication Date:
October 10, 2013
Filing Date:
March 29, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B01D69/02; B01D39/16; B01D39/20; B01D69/04; B01D69/10; B01D69/12; B01D71/02
Foreign References:
| JP2010214255A | 2010-09-30 | |||
| JP2006263566A | 2006-10-05 | |||
| JP2002177747A | 2002-06-25 | |||
| JP2005246340A | 2005-09-15 |
Attorney, Agent or Firm:
BECCHAKU, Shigehisa et al. (JP)
Role of another Shigehisa (JP)
Role of another Shigehisa (JP)
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