Title:
FINE PARTICLE DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/185623
Kind Code:
A1
Abstract:
A fine particle detection device is provided with an irradiation optical system (1) for irradiating a specimen in a disk (6) with light from light sources (8, 12), a light detection optical system for detecting light from fine particles in the specimen, a detection unit for detecting the fine particles, a test sample for detecting the focus position of light focused by the irradiation optical system (1), and a rotation driving system for accommodating the disk (6) and test sample in a holder (26) and rotating the same. The test sample has a first light scattering film pattern disposed at the position of a first level in the direction of the axis of rotation and a second light scattering film pattern disposed at the position of a second level in the direction of the axis of rotation. The light detection optical system is capable of detecting the light emitted from both light scattering film patterns, and the detection unit is capable of detecting the focus position on the basis of the light intensities of the detected light from both light scattering film patterns.
Inventors:
ITOH HIROYUKI
MIYAKE TAKAHIRO
MIYAKE TAKAHIRO
Application Number:
PCT/JP2015/073733
Publication Date:
November 24, 2016
Filing Date:
August 24, 2015
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
G01N15/14; G01N21/27; G01N21/51; G01N21/64
Domestic Patent References:
| WO2013146364A1 | 2013-10-03 |
Foreign References:
| JP2007183123A | 2007-07-19 | |||
| JP2002310886A | 2002-10-23 | |||
| JP2002296509A | 2002-10-09 |
Attorney, Agent or Firm:
SAMEJIMA, Mutsumi et al. (JP)
鮫島 睦 (JP)
鮫島 睦 (JP)
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