Title:
FLEXIBLE SILICON STRAIN GAGE
Document Type and Number:
WIPO Patent Application WO2000006983
Kind Code:
A9
Abstract:
A generally flexible strain gage comprising a strain sensing element, and a generally flexible substrate supporting the strain sensing element. The strain sensing element is made of single crystal or polycrystalline semiconducting material. The invention also includes a method for forming a generally flexible strain gage comprising the step of selecting a wafer having a portion of a base material and portion of a single crystal or polycrystalline semiconducting material located thereon. The method further comprises the steps of etching a strain sensing element out of the semiconducting material and forming a generally flexible substrate onto said sensing element.
Inventors:
BOGGS BRADLEY J (US)
JUST MARCUS S (US)
BANG CHRISTOPHER A (US)
STARK KEVIN C (US)
JUST MARCUS S (US)
BANG CHRISTOPHER A (US)
STARK KEVIN C (US)
Application Number:
PCT/US1999/016900
Publication Date:
May 25, 2000
Filing Date:
July 27, 1999
Export Citation:
Assignee:
ROSEMOUNT AEROSPACE INC (US)
BOGGS BRADLEY J (US)
JUST MARCUS S (US)
BANG CHRISTOPHER A (US)
STARK KEVIN C (US)
BOGGS BRADLEY J (US)
JUST MARCUS S (US)
BANG CHRISTOPHER A (US)
STARK KEVIN C (US)
International Classes:
G01L1/18; G01L1/22; G01L9/00; H01L29/84; (IPC1-7): G01L1/22; G01L1/18; G01L9/00
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