Title:
FLEXIBLE TRANSPARENT ELECTRODE HAVING AZO/AG/AZO MULTILAYERED THIN FILM STRUCTURE, AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2017/030352
Kind Code:
A1
Abstract:
The present invention relates to a flexible transparent electrode having an AZO/Ag/AZO multilayered thin film structure and, more specifically, to a flexible transparent electrode comprising: an Ag metal layer; and Al-doped ZnO layers which are respectively laminated on the upper surface and the lower surface of the Ag metal layer, wherein the thickness of the Ag metal layer is 15 nm to 23 nm, and the thickness of the Al-doped ZnO layers is 15 nm to 60 nm. The present invention is capable of providing a flexible transparent electrode having high transmittance comparable to conventional ITO electrodes and having a low surface resistance value. Further, the flexible transparent electrode is manufactured by a room temperature deposition process, and thus can be manufactured on a polymer substrate without the need of a high-temperature heat treatment.
Inventors:
KIM JUN HO (KR)
SEONG TAE YEON (KR)
SEONG TAE YEON (KR)
Application Number:
PCT/KR2016/009005
Publication Date:
February 23, 2017
Filing Date:
August 17, 2016
Export Citation:
Assignee:
UNIV KOREA RES & BUS FOUND (KR)
International Classes:
H01B13/00; H01B1/02; H01B1/08; H01B3/30; H01B5/14
Foreign References:
| KR20130058717A | 2013-06-04 | |||
| KR20110049388A | 2011-05-12 | |||
| KR20030022835A | 2003-03-17 |
Other References:
KJM, SANG MO ET AL.: "AZO/Ag/AZO Multilayer Prepared on Polymer Substrate", PROCEEDINGS OF THE KOREAN SOCIETY OF SEMICONDUCTOR EQUIPMENT. TECHNOTOGY, 2007
JUNG, YU SUP ET AL.: "Properties of AZO/Ag/AZO Multilayer Thin Film Deposited on Polyethersulfone Substrate", TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, vol. 14, no. 1, 25 February 2013 (2013-02-25), XP055374110
JUNG, YU SUP ET AL.: "Properties of AZO/Ag/AZO Multilayer Thin Film Deposited on Polyethersulfone Substrate", TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, vol. 14, no. 1, 25 February 2013 (2013-02-25), XP055374110
Attorney, Agent or Firm:
JUNG, Eun Youl (KR)
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