Title:
FLOAT TRANSPORTATION DEVICE AND FLOAT TRANSPORTATION METHOD
Document Type and Number:
WIPO Patent Application WO/2013/121634
Kind Code:
A1
Abstract:
Provided is a low-cost transport technology with which the object being transported can be transported without contact and in a stable manner, even when a transport line is constructed by aligning multiple rails in the transport direction. Multiple compressed gas exhaust holes (22), for the purpose of blowing onto a substrate (5) on the transport surface (20) a compressed gas that has been supplied to a ventilation path, and multiple spiral flow generation parts (23), which blow the compressed gas and generate a spiral flow, are formed on the transport surface (20) of a rail (2). Multiple spiral flow generation parts (23) are formed at least at positions on the transport surface (20) corresponding to the rear edge (51b) of the substrate (5) when the front edge (51a) of the substrate (5) reaches the rearward edge (21b), in the transport direction (A), of the transport surface (20) of the subsequent rail (2), and are formed at positions on the transport surface (20) corresponding to the front edge (51a) of the substrate (5) when the rear edge (51b) of the substrate (5) reaches the forward edge (21a), in the transport direction (A), of the transport surface (20) of the rail (2).
More Like This:
Inventors:
YASUDA TAKAHIRO (JP)
TSUNODA KOICHI (JP)
IKEDA TOSHIYUKI (JP)
OZAWA HIDEO (JP)
TSUNODA KOICHI (JP)
IKEDA TOSHIYUKI (JP)
OZAWA HIDEO (JP)
Application Number:
PCT/JP2012/079077
Publication Date:
August 22, 2013
Filing Date:
November 09, 2012
Export Citation:
Assignee:
OILES INDUSTRY CO LTD (JP)
International Classes:
B65G51/03; B65G49/06; H01L21/677
Domestic Patent References:
WO2009119377A1 | 2009-10-01 |
Foreign References:
JP2011519796A | 2011-07-14 | |||
JP2007324382A | 2007-12-13 | |||
JP2010083591A | 2010-04-15 | |||
JP2011207552A | 2011-10-20 |
Attorney, Agent or Firm:
OHZEKI, Mitsuhiro (JP)
Mitsuhiro Ozeki (JP)
Mitsuhiro Ozeki (JP)
Download PDF:
Claims: