Title:
FLOW PATH MEMBER AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2021/201108
Kind Code:
A1
Abstract:
The present disclosure relates to a flow path member comprising a dense ceramic body which has an upper surface and a lower surface, has a thickness of more than or equal to 50 mm between the upper surface and the lower surface, and has a plan-view area greater than or equal to the area of a circle with a diameter of 350 mm. The dense ceramic body is internally provided with a first flow path, and the first flow path has a depth greater than the width of the first flow path.
Inventors:
TERAMOTO KOUJI (JP)
FURUKAWA SHIGENOBU (JP)
FURUKAWA SHIGENOBU (JP)
Application Number:
PCT/JP2021/013856
Publication Date:
October 07, 2021
Filing Date:
March 31, 2021
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/683
Foreign References:
| JP2017208527A | 2017-11-24 | |||
| JP2017126641A | 2017-07-20 | |||
| JP2014216516A | 2014-11-17 |
Attorney, Agent or Firm:
BUNA PATENT ATTORNEYS (JP)
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