FLOW PATH MEMBER AND SEMICONDUCTOR MODULE

Title:

FLOW PATH MEMBER AND SEMICONDUCTOR MODULE

Document Type and Number:

WIPO Patent Application WO/2017/104830

Kind Code:

A1

Abstract:

This flow path member is made from a silicon nitride ceramic, and provided within the flow path member are an inflow port, an outflow port, and a flow path that is connected to the inflow port and the outflow port. A plurality of needle-like crystals are present on the surface of the flow path and intersect each other.

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Inventors:

ISHIMINE YUUSAKU (JP)
MUNEISHI TAKESHI (JP)
FUJIO KAZUHIKO (JP)
FUKUDA YOSHIYUKI (JP)
TAKANAMI KENTARO (JP)
SHIRAI TAKAO (JP)

Application Number:

PCT/JP2016/087641

Publication Date:

June 22, 2017

Filing Date:

December 16, 2016

Export Citation:

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Assignee:

KYOCERA CORP (JP)
TOSHIBA MATERIALS CO LTD (JP)

International Classes:

H01L23/473; H05K7/20; F28F13/02

Domestic Patent References:

WO2015147071A1

2015-10-01

Foreign References:

JP2013012591A	2013-01-17
JP2013207200A	2013-10-07
JP2005213081A	2005-08-11

Other References: