Title:
FLUID CONTROL DEVICE AND METHOD FOR CONTROLLING SAME
Document Type and Number:
WIPO Patent Application WO/2022/209945
Kind Code:
A1
Abstract:
In the present invention, a control circuit executes a first mode, a second mode, and a third mode in sequence as a specific pattern control. In the first mode, the control circuit closes a u-valve (17), drives a u-piezoelectric pump (12), opens a d-valve (19), and stops driving a d-piezoelectric pump (14). In the second mode, the control circuit closes the u-valve (17), drives the u-piezoelectric pump (12), opens the d-valve (19), and drives the d-piezoelectric pump (14). In the third mode, the control circuit opens the u-valve (17), stops driving the u-piezoelectric pump (12), opens the d-valve (19), and stops driving of the d-piezoelectric pump (14).
Inventors:
OKAGUCHI KENJIRO (JP)
Application Number:
PCT/JP2022/012213
Publication Date:
October 06, 2022
Filing Date:
March 17, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
F04B49/06; F04B45/047
Domestic Patent References:
| WO2019198305A1 | 2019-10-17 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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