Title:
FLUID CONTROL DEVICE, AND OUTPUT ADJUSTMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2022/209481
Kind Code:
A1
Abstract:
The present disclosure provides: a fluid control device in which the output of a pump can be easily adjusted even when a change occurs in atmospheric pressure; and an output adjustment method. A pump unit (10) comprises: a first flow path (11); an u piezoelectric pump (12); a d piezoelectric pump (14); a second flow path (13); a third flow path (15); a control circuit (100) capable of controlling driving of the u piezoelectric pump (12) and the d piezoelectric pump (14); and a current sensor (200) that detects a current of each of the u piezoelectric pump (12) and the d piezoelectric pump (14). The control circuit (100) is capable of adjusting at least one of the outputs of the u piezoelectric pump (12) and the d piezoelectric pump (14) on the basis of the difference (Iu - Id) between a current Iu of the u piezoelectric pump (12) and a current Id of the d piezoelectric pump (14), which are detected using the current sensor (200).
Inventors:
OKAGUCHI KENJIRO (JP)
Application Number:
PCT/JP2022/007852
Publication Date:
October 06, 2022
Filing Date:
February 25, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
F04B49/06
Domestic Patent References:
| WO2020217934A1 | 2020-10-29 |
Foreign References:
| JP2005207368A | 2005-08-04 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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