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Title:
FLUID CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/021949
Kind Code:
A1
Abstract:
In order to appropriately control the temperatures of fluid heating units that are maintained at different temperatures, this fluid control device (100) is equipped with a plurality of fluid heating units (1) which are mutually connected and are provided with a flow path or a fluid housing portion in the interior thereof, a heater (10) which is configured so as to heat the plurality of fluid heating units to different temperatures, and heat-insulating members (13, 13') which are disposed between adjacent fluid heating units.

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Inventors:
HIDAKA ATSUSHI (JP)
NAKATANI TAKATOSHI (JP)
NAKATSUJI KEISUKE (JP)
HIRAO KEIJI (JP)
MINAMI YUKIO (JP)
IKEDA NOBUKAZU (JP)
Application Number:
PCT/JP2018/027234
Publication Date:
January 31, 2019
Filing Date:
July 20, 2018
Export Citation:
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Assignee:
FUJIKIN KK (JP)
International Classes:
C23C16/52; H01L21/31
Foreign References:
JPH1187327A1999-03-30
JP2000282242A2000-10-10
JP2001152343A2001-06-05
JP2002217181A2002-08-02
JP2005259723A2005-09-22
JP2009246173A2009-10-22
Attorney, Agent or Firm:
TANIDA Ryuichi et al. (JP)
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