Title:
FLUID CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/159502
Kind Code:
A1
Abstract:
This fluid control device (10) comprises a valve (20) and a pump (30). The valve (20) has a valve chamber (200). A first main plate (21) has a first opening part (201) through which the interior and exterior of the valve chamber (200) communicate, and a second main plate (22) has a second opening part (202) through which the interior and exterior of the valve chamber (200) communicate. A valve (24) capable of switching the communication state is disposed inside the valve chamber (200). The pump (30) has a piezoelectric element (332) and a pump chamber (300). The pump chamber (300) communicates with the valve chamber (200) via the second opening part (22). During bending vibration of a vibrating part (33), the frequency coefficient of the first main plate (21) is greater than the frequency coefficient of the second main plate (22).
Inventors:
TANAKA NOBUHIRA (JP)
KONDO DAISUKE (JP)
YOKOI HIROYUKI (JP)
KONDO DAISUKE (JP)
YOKOI HIROYUKI (JP)
Application Number:
PCT/JP2018/044654
Publication Date:
August 22, 2019
Filing Date:
December 05, 2018
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
F04B45/047
Foreign References:
| JP2017072140A | 2017-04-13 | |||
| JP2015117647A | 2015-06-25 |
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (JP)
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