FLUID CONTROL DEVICE

WIPO Patent Application WO/2022/014121

A1

A fluid control device (10) comprises: a first flat plate (21); a frame body (22) that is disposed on the outside of an outer peripheral edge (210) of the first flat plate (21) with openings (241, 242) therebetween; a joining member (23) that joins the first plate (21) and the frame body (22) with each other; a plate member (40) provided with through holes (400) in portions facing the first flat plate (21); and a valve member (60) for regulating a fluid. An outer edge (610) of the valve member (60) protrudes further outside than the outer peripheral edge (210) of the first flat plate (21). The inner edge side of the valve member (60), which is located on the central side of the first flat plate (21), is fixed to the first flat plate (21) while the outer edge (610) is not fixed thereto. The valve member (60) has a first portion on the outer edge side and a second portion on the inner edge side of the first portion. The thickness of the second portion is thicker than that of the first portion. In a plan view, the second portion overlaps with the outer peripheral edge (210) of the first flat plate (21).

TANAKA NOBUHIRA (JP)

PCT/JP2021/016807

January 20, 2022

April 27, 2021

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MURATA MANUFACTURING CO (JP)

F16K15/14; F04B43/04; F04B45/047

WO2019230159A1	2019-12-05
WO2019159448A1	2019-08-22
WO2019221121A1	2019-11-21

JP2017133508A	2017-08-03
JPH10213077A	1998-08-11
JP2009299871A	2009-12-24
JPH05172060A	1993-07-09

KAEDE PATENT ATTORNEYS' OFFICE (JP)

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