FLUID DEVICE, METHOD FOR CONTROLLING FLUID, INSPECTION DEVICE, INSPECTION METHOD, AND METHOD FOR MANUFACTURING FLUID DEVICE

WIPO Patent Application WO/2016/002847

A1

　A fluid device provided with a valve for regulating the flow of a fluid in a first direction (F) of a flow path (3), wherein said device is provided with: a valve diaphragm (D); a first substrate (1) having a groove (3) constituting the flow path (3) and a projecting part (4) in a position in the groove (3) facing the diaphragm (D); and a second substrate (2) on which the diaphragm (D) is fixed at a first fixing portion (B1) and a second fixing portion (B2); the length (W1) viewed in the first direction (F) from a first end part (4a) of the projecting part (4) to a second end part (4b) of the projecting part (4) being greater than the length (W2) from the first fixing portion (B1) to the second fixing portion (B2).

MIYAMOTO KENJI (JP)
KATO MASARU (JP)

PCT/JP2015/069018

January 07, 2016

July 01, 2015

Click for automatic bibliography generation  

NIKON CORP (JP)

B01J19/00; B81B3/00; B81C3/00; C12M1/00; F16K7/17; G01N35/08; G01N37/00

WO2015083829A1

2015-06-11

JP2002527250A	2002-08-27
US20140079571A1	2014-03-20
US20130032235A1	2013-02-07

CHENYANG JIANG ET AL.: "Implementation of the shape-memory polymer microfluidic valve to plastic-based microfluidic devices", JSAP SPRING MEETING KOEN YOKOSHU, 3 March 2014 (2014-03-03), pages 12 - 434, XP055249651
SHOTARO TERANE ET AL.: "Development of PDMS pneumatic valves implemented in acrylic microfluidic device", JSAP SPRING MEETING KOEN YOKOSHU, 3 March 2014 (2014-03-03), pages 12 - 435, XP055249653

SHIGA Masatake et al. (JP)
Masatake Shiga (JP)

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