Title:
FLUID DISCHARGING DEVICE AND FLUID DISCHARGING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/104745
Kind Code:
A1
Abstract:
A fluid discharging method for applying fluid to inside a mask upon a workpiece for an electronic component, wherein a fluid discharging device comprising a head unit that is smaller than the workpiece and that is provided with a discharge head having a discharge nozzle interposed between a tank and a suction opening is used, and said fluid is discharged while reciprocating the discharge head with respect to the workpiece. A fluid discharging device for applying fluid to inside a mask upon a workpiece for an electronic component, said device comprising: a head unit that is smaller than the workpiece and that is provided with a (plurality of variable-angle) discharge head(s) having a discharge nozzle interposed between a tank and a suction opening. A fluid discharging device for applying fluid upon a workpiece for an electronic component, said device comprising: a stage that supports the workpiece; a first discharge head that discharges fluid while linearly moving above the stage in the horizontal direction; and a second discharge head that is configured so as to discharge fluid while moving above the stage in the horizontal direction, wherein the range within which the first discharge head and the second discharge head can discharge fluid is smaller than the placement area of the workpiece upon the stage.
Inventors:
NAKAMURA HIDEKI (JP)
NAUCHI TAKASHI (JP)
MUTSUJI TOSHIHIKO (JP)
SUZUKI RYOICHI (JP)
NAUCHI TAKASHI (JP)
MUTSUJI TOSHIHIKO (JP)
SUZUKI RYOICHI (JP)
Application Number:
PCT/JP2016/087369
Publication Date:
June 22, 2017
Filing Date:
December 15, 2016
Export Citation:
Assignee:
SENJU METAL INDUSTRY CO (JP)
International Classes:
B05C5/02; B05D1/26; B05C11/10; B05C21/00; B05D3/12; B05D7/00; B23K3/06; H01L21/60; H05K3/10; H05K3/28; H05K3/34; B23K101/40; B23K101/42
Domestic Patent References:
| WO2013058299A1 | 2013-04-25 | |||
| WO2016114275A1 | 2016-07-21 |
Foreign References:
| JP2014157863A | 2014-08-28 | |||
| JP2002260985A | 2002-09-13 | |||
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| JPH07202399A | 1995-08-04 | |||
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Other References:
See also references of EP 3391974A4
Attorney, Agent or Firm:
ONO, Shinjiro et al. (JP)
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