Title:
FLUID MEDIUM MONITORING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2020/230995
Kind Code:
A1
Abstract:
A fluid medium monitoring apparatus of the present invention comprises: a light source unit for irradiating light; a first collimator unit for collimating light irradiated from the light source unit; a flow cell unit in which a fluid medium flows and light is allowed to absorb the wavelength of the fluid medium while proceeding along the moving direction of the fluid medium; and a light detection unit for detecting the wavelength of the light passing through the flow cell unit.
Inventors:
PARK HYUN KOOK (KR)
CHOI CHANG HO (KR)
PARK SEONG HWAN (KR)
CHOI CHANG HO (KR)
PARK SEONG HWAN (KR)
Application Number:
PCT/KR2020/003822
Publication Date:
November 19, 2020
Filing Date:
March 20, 2020
Export Citation:
Assignee:
ZEUS CO LTD (KR)
ZEUS ENP CO LTD (KR)
ZEUS ENP CO LTD (KR)
International Classes:
G01N15/06; G01N21/31; H01L21/67
Domestic Patent References:
| WO2007062800A1 | 2007-06-07 | |||
| WO2016171042A1 | 2016-10-27 |
Foreign References:
| KR20180027331A | 2018-03-14 | |||
| KR20140118864A | 2014-10-08 | |||
| KR20170134742A | 2017-12-06 |
Attorney, Agent or Firm:
AJU INTERNATIONAL LAW & PATENT GROUP (KR)
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