FLUID MIXING DEVICE AND CUTTING DEVICE

WIPO Patent Application WO/2003/082523

A1

A fluid mixing device (30) used for processing using processing fluid, comprising a first fluid feed passage (34) for feeding first fluid, a second fluid feed passage (43) for feeding second fluid, and a mixing part (41) for generating mixed fluid by mixing the first fluid with the second fluid, wherein the first fluid feed passage (34) is branched into a first route (37) and a second route (38) through a flow ratio regulating part (36), the second route (38) is branched, at a branch part (39), to a third route (40) with a preset flow ratio, the third route (40) is connected to the mixing part (41), the second fluid feed passage (43) and a fourth route (44) are connected to the mixing part (41), the mixed flow generated by mixing, in the mixing part (41), the first fluid flowing in from the third route (40) with the second fluid flowing in from the second fluid passage (43) flows out to the fourth route (44), the fourth route (44) is merged to the second route (38) on the downstream side of the branch part (39), and the second route (38) is merged to the first route (37), whereby the specific resistant value of the processing fluid can be accurately set to a specified value by an economical method.

YOSHIDA MIKI (JP)

PCT/JP2003/001237

October 09, 2003

February 06, 2003

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DISCO CORP (JP)
YOSHIDA MIKI (JP)

B01F3/04; B01F5/02; B01F15/04; B23Q11/10; B24B55/02; B24B57/02; B28D5/00; H01L21/00; H01L21/301; (IPC1-7): B24B55/02; B01F3/04; H01L21/304

JPH07204524A	1995-08-08
US6158721A	2000-12-12
US5609798A	1997-03-11
EP0370870A1	1990-05-30
EP1055445A2	2000-11-29

Sasaki, Isao (KAWAMURA & ASSOCIATES Toranomon Sangyo Bldg. 6F 2-2, Toranomon 1-chome Minato-ku Tokyo, JP)

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