Title:
FLUID SUPPLY DEVICE AND LIQUID DISCHARGE METHOD FOR SAID DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/035351
Kind Code:
A1
Abstract:
[Problem] To provide a fluid supply device and a liquid discharge method suitable for said device, which make it possible to prevent failures due to freezing in a variety of devices installed in a main tubing. [Solution] The invention comprises: a condenser 130; a tank 140 for retaining fluid; a pump 160 for pumping the fluid toward a treatment chamber 500; a main tubing 2 for using the weight of the liquid retained in the tank 140 where the tank 140 and the pump 160 are joined to transport the liquid to the pump 160; and a discharge tubing 5 that has one end connected to the main tubing 2 at the lowest position MB of the main tubing 2 and another end that is open to the atmosphere, and that is for vaporizing the liquid in the tank 140 and the main tubing 2 and discharging same to the exterior. The discharge tubing 5 is formed so that a liquid pool occurs temporarily in the discharge tubing 5 after all of the liquid in the tank 140 and the main tubing 2 has been discharged, the liquid pool separating an atmosphere-side space and a main tubing 2-side space of the discharge tubing 5.
Inventors:
YOSHIDA TOSHIHIDE (JP)
MINAMI YUKIO (JP)
SHINOHARA TSUTOMU (JP)
MINAMI YUKIO (JP)
SHINOHARA TSUTOMU (JP)
Application Number:
PCT/JP2018/028620
Publication Date:
February 21, 2019
Filing Date:
July 31, 2018
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
H01L21/304; B01J4/00; B05B12/00; B05C11/10; B05D3/00; H01L21/027
Domestic Patent References:
| WO2014083639A1 | 2014-06-05 |
Foreign References:
| JP2013012538A | 2013-01-17 | |||
| JP2014101241A | 2014-06-05 | |||
| JP2014034027A | 2014-02-24 |
Attorney, Agent or Firm:
FUJIMOTO Kenji (JP)
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