Title:
FLUID SUPPLY SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/039073
Kind Code:
A1
Abstract:
This fluid supply system is provided with: a support body including a base plate, a side plate provided on one side in a longitudinal direction of the base plate so as to be perpendicular to the base plate, and a top plate provided at one end in a height direction of the base plate so as to be perpendicular to the base plate and the side plate; a process gas supply unit provided on an outer surface of the top plate; a liquid supply unit provided on an inner surface of the side plate so as to be in communication with the process gas supply unit through a communication flow path forming block; and a purge gas supply unit provided on the inner surface of the base plate so as to be in communication with the process gas supply unit via a communication pipe.
Inventors:
TAKASAWA RYUHEI (JP)
TAGASHIRA NAOTO (JP)
FUNABIKI TERUYUKI (JP)
UEBAYASHI MASANORI (JP)
TAGASHIRA NAOTO (JP)
FUNABIKI TERUYUKI (JP)
UEBAYASHI MASANORI (JP)
Application Number:
PCT/JP2020/024738
Publication Date:
March 04, 2021
Filing Date:
June 24, 2020
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
C23C16/448; H01L21/31
Foreign References:
| US20130333621A1 | 2013-12-19 | |||
| JP2014114463A | 2014-06-26 | |||
| JPH11267492A | 1999-10-05 | |||
| JPH0947697A | 1997-02-18 |
Attorney, Agent or Firm:
GOTOH & PARTNERS (JP)
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