FLUORESCENT X-RAY ANALYSIS DEVICE

Title:

FLUORESCENT X-RAY ANALYSIS DEVICE

Document Type and Number:

WIPO Patent Application WO/2022/091598

Kind Code:

A1

Abstract:

An excluding means (21) with which a fluorescent X-ray analysis device according to the present invention is provided: calculates an adhesion amount for a component of which a measurement element is not included in a base layer, on the assumption that the component individually constitutes a thin film, for each corresponding measurement ray; sets the maximum adhesion amount as the initial value of the adhesion amount of the component; calculates the adhesion amount for a component of which a measurement element is included in the base layer, on the basis of the initial value of the adhesion amount of each component of which the measurement element is not included in the base layer, for each corresponding measurement ray; if the calculated results are errors for all the corresponding measurement rays, excludes the component from the analysis target, as an unquantifiable component; and in other cases sets the maximum adhesion amount as the initial value of the adhesion amount of the component.

Inventors:

HARA SHINYA (JP)
YAMADA YASUJIRO (JP)
KODAMA KENJI (JP)
DOI MAKOTO (JP)

Application Number:

PCT/JP2021/033364

Publication Date:

May 05, 2022

Filing Date:

September 10, 2021

Export Citation:

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Assignee:

RIGAKU DENKI CO LTD (JP)

International Classes:

G01N23/223

Domestic Patent References:

WO2017026200A1

2017-02-16

Foreign References:

JP2003107020A	2003-04-09
JP2006071311A	2006-03-16
JP2004004102A	2004-01-08
CN110530912A	2019-12-03
US8515009B1	2013-08-20

Other References: