Title:
FLUORINE-CONTAINING GAS DECOMPOSING/REMOVING AGENT, METHOD FOR PRODUCING SAME, AND FLUORINE-CONTAINING GAS REMOVING METHOD AND FLUORINE RESOURCE RECOVERY METHOD EACH USING SAME
Document Type and Number:
WIPO Patent Application WO/2018/230121
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing: a removing agent which can decompose a fluorine-containing gas, particularly a perfluoro compound (PFC) used for etching in the production of a semiconductor or the like and for the dry cleaning of CVD devices, with high efficiency without needing to add water or oxygen, and which can immobilize fluorine in the form of an alkali earth fluoride in the removing agent; a method for producing the removing agent; and a fluorine-containing gas removing method and a fluorine resource recovery method, in each of which the removing agent is used. The problem can be solved by a fluorine-containing gas removing agent containing alumina and an alkali earth metal compound, wherein an ammonia desorption curve obtained by an ammonia TPD-MS method having a mass-to-charge ratio of 15 has a peak in a range lower than 200°C and has a shoulder in a range of 200°C or higher.
Inventors:
NAKASHIMA TADAHITO (JP)
KIM HYUN-JOONG (JP)
KIM HYUN-JOONG (JP)
Application Number:
PCT/JP2018/014979
Publication Date:
December 20, 2018
Filing Date:
April 10, 2018
Export Citation:
Assignee:
CLARIANT CATALYSTS JAPAN KK (JP)
International Classes:
B01J23/02; B01D53/14; B01D53/68; B01D53/70; B01D53/81; B01D53/86; B01J20/04; B01J20/28; B01J20/30; B01J37/04
Foreign References:
| JP2002224565A | 2002-08-13 | |||
| JP2001190959A | 2001-07-17 | |||
| GB2295101A | 1996-05-22 | |||
| JP2010158619A | 2010-07-22 |
Other References:
HATTORI, KEI ET AL.: "High-performance decomposition and fixation of dry etching exhaust perfluoro-compound gases and study of their mechanism", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 50, no. 11R, 25 October 2011 (2011-10-25), pages 117301.1 - 117301.8, XP001573679, ISSN: 0021-4922
NAGATA, HIDEO ET AL.: "(non-official translation) Hydrolysis reaction of hexafluoroethane using various alumina catalysts", PROCEEDINGS OF THE 100TH FORUM A OF CATALYSIS SOCIETY OF JAPAN, 2007, pages 249, ISSN: 1343-9936
NAGATA, HIDEO ET AL.: "(non-official translation) Hydrolysis reaction of hexafluoroethane using various alumina catalysts", PROCEEDINGS OF THE 100TH FORUM A OF CATALYSIS SOCIETY OF JAPAN, 2007, pages 249, ISSN: 1343-9936
Attorney, Agent or Firm:
ESAKI Koushi et al. (JP)
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