Title:
FLUORINE-FREE CLEANING AGENT, PREPARATION METHOD THEREFOR AND USE THEREOF
Document Type and Number:
WIPO Patent Application WO/2023/133876
Kind Code:
A1
Abstract:
Provided in the present invention is a fluorine-free cleaning agent. The fluorine-free cleaning agent is a water-based cleaning agent. The fluorine-free cleaning agent comprises water, an organic solvent and an amine compound, wherein the mass of the organic solvent is 15-85% of the mass of the fluorine-free cleaning agent; and the mass of the amine compound is 5-50% of the mass of the fluorine-free cleaning agent. The fluorine-free cleaning agent further comprises one or more of a corrosion inhibitor, an acid compound and an alcohol compound. Compared with the prior art, by means of a synergistic effect of the specific amine compound and one or more of a corrosion inhibitor, an acid and an alcohol, the fluorine-free cleaning agent provided in the present invention has a good cleaning capacity under the condition that the fluorine element is not contained; in addition, corrosion of the cleaning agent to a metal can be further reduced, damage to a substrate medium is prevented, and the weather resistance of a cleaned wafer is improved. Compared with existing similar products, the fluorine-free cleaning agent provided in the present invention has the obvious advantages of reducing the cleaning temperature and the cleaning time, higher cost performance, etc.
Inventors:
ZHANG AIQIANG (CN)
CHEN TING (CN)
NEISSER MARK (CN)
LU CONGJIE (CN)
LUO SONGSONG (CN)
LAI WEISHUN (CN)
CHEN TING (CN)
NEISSER MARK (CN)
LU CONGJIE (CN)
LUO SONGSONG (CN)
LAI WEISHUN (CN)
Application Number:
PCT/CN2022/072276
Publication Date:
July 20, 2023
Filing Date:
January 17, 2022
Export Citation:
Assignee:
TAN KAH KEE INNOVATION LABORATORY (CN)
International Classes:
C11D1/22; C11D1/74; C11D3/04; C11D3/20; C11D3/22; C11D3/26; C11D3/28; C11D3/30; C11D3/32; C11D3/34; C11D3/60; C11D7/08; C11D7/26; C11D7/32; C11D7/50; C11D7/60; H01L21/02
Foreign References:
| CN114317127A | 2022-04-12 | |||
| CN105785725A | 2016-07-20 | |||
| CN108255026A | 2018-07-06 | |||
| US20050202987A1 | 2005-09-15 | |||
| CN104099194A | 2014-10-15 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW (CN)
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