Title:
FOCUSSING LENS FOR CHARGED PARTICLE BEAMS
Document Type and Number:
WIPO Patent Application WO2005071708
Kind Code:
A3
Abstract:
The present invention relates to a focussing lens (100) for focussing a charged particle beam (7) onto a specimen (3) at a predetermined landing angle (42; 42'; 42) comprising at least one first electrode (26, 105, 105a) having a first aperture (106) to generate a focussing electric field (110) for focussing the charged particle beam (7) onto the specimen (3); and a correcting electrode having a curved surface (115) to compensate for landing angle dependent distortions of the focussing electric field (110) caused by the specimen (3). With the curved surface (115) of the correcting electrode it is possible to improve the focussing of a charged particle beam at landing angles that differ from the perpendicular landing angle.
Inventors:
FEUERBAUM HANS-PETER (DE)
Application Number:
PCT/EP2005/000598
Publication Date:
December 08, 2005
Filing Date:
January 21, 2005
Export Citation:
Assignee:
INTEGRATED CIRCUIT TESTING (DE)
FEUERBAUM HANS-PETER (DE)
FEUERBAUM HANS-PETER (DE)
International Classes:
H01J37/12; H01J37/28; (IPC1-7): H01J37/28
Domestic Patent References:
| WO2002037523A2 | 2002-05-10 |
Foreign References:
| EP0762468A1 | 1997-03-12 | |||
| EP0732726A2 | 1996-09-18 | |||
| US20040000640A1 | 2004-01-01 | |||
| US6037589A | 2000-03-14 | |||
| US6504164B2 | 2003-01-07 |
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