FORMING CARBON NANOTUBES AT LOWER TEMPERATURES SUITABLE FOR ELECTRON-EMITTING DEVICE, AND ASSOCIATED FABRICATION METHOD

Title:

FORMING CARBON NANOTUBES AT LOWER TEMPERATURES SUITABLE FOR ELECTRON-EMITTING DEVICE, AND ASSOCIATED FABRICATION METHOD

Document Type and Number:

WIPO Patent Application WO2005004185

Kind Code:

A3

Abstract:

An electron-emitting device contains a vertical emitter electrode patterned into multiple laterally separated sections situated between the electronemissive elements, on one hand, and a substrate, on the other hand. The electron-emissive elements comprising carbon nanotubes are grown at a temperature range of 300 °C to 500 °C compatible with the thermal stress of the underlying substrate. The electron-emissive elements are grown on a granulized catalyst layer that provides a large surface arda for growing the electronemissive elements at such low temperature ranges. To ensure growth uniformity of the carbon nanotubes, the granularized substrate is soaked in a pre-growth plasma gas to enhance the surface diffusion properties of the granularized substrate for carbon diffusion.

Inventors:

KANG SU GU (KR)
BAE WOO KYUNG (KR)
KIM JUNG JAE (KR)

Application Number:

PCT/US2004/018640

Publication Date:

September 29, 2005

Filing Date:

June 09, 2004

Export Citation:

Click for automatic bibliography generation Help

Assignee:

CDREAM DISPLAY CORP (US)
KANG SU GU (KR)
BAE WOO KYUNG (KR)
KIM JUNG JAE (KR)

International Classes:

H01J9/04; H01J9/12; H01J9/14; H01J; (IPC1-7): H01J9/04; H01J9/12; H01J9/14

Domestic Patent References:

WO2001094260A1

2001-12-13

Foreign References:

US6062931A	2000-05-16
US6331209B1	2001-12-18
US6692717B1	2004-02-17

Download PDF:

View/Download PDF PDF Help

Previous Patent: METHOD OF LAYERING GREEN SHEET AND METHOD OF PRODUCING LAMINATED CERAMIC ELECTRONIC COMPONENT

Next Patent: PARTICLE DETECTOR SUITABLE FOR DETECTING LONS AND ELECTRONS