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Title:
FREE-STANDING SUBSTRATE, MANUFACTURING METHOD THEREOF AND SEMICONDUCTOR LIGHT-EMITTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2006/101225
Kind Code:
A1
Abstract:
Disclosed are a free-standing substrate, a manufacturing method thereof, and a semiconductor light-emitting device. The free-standing substrate comprises a semiconductor layer and inorganic particles, and the inorganic particles are contained in the semiconductor layer. The method for manufacturing a free-standing substrate comprises the following steps (a)-(c) in this order: the step (a) for arranging inorganic particles on a substrate, the step (b) for growing a semiconductor layer, and the step (c) for separating the semiconductor layer from the substrate. Alternatively, the method for manufacturing a free-standing substrate comprises the following steps (s1), (a), (b) and (c) in this order: the step (s1) for growing a buffer layer on a substrate, the step (a) for arranging inorganic particles on the buffer layer, the step (b) for growing a semiconductor layer, and the step (c) for separating the semiconductor layer from the substrate. The semiconductor light-emitting device comprises the free-standing substrate, a conductive layer, a light-emitting layer and an electrode.

Inventors:
UEDA KAZUMASA (JP)
NISHIKAWA NAOHIRO (JP)
TSUCHIDA YOSHIHIKO (JP)
Application Number:
PCT/JP2006/306068
Publication Date:
September 28, 2006
Filing Date:
March 20, 2006
Export Citation:
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Assignee:
SUMITOMO CHEMICAL CO (JP)
UEDA KAZUMASA (JP)
NISHIKAWA NAOHIRO (JP)
TSUCHIDA YOSHIHIKO (JP)
International Classes:
H01L21/205; C23C16/01; C23C16/34; H01L33/00
Foreign References:
JP2000349333A2000-12-15
JP2003282450A2003-10-03
JP2000196192A2000-07-14
Attorney, Agent or Firm:
Enomoto, Masayuki c/o Sumitomo Chemical Intellectual Property Service (Limited 5-33, Kitahama 4-chome, Chuo-k, Osaka-shi Osaka 50, JP)
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