Title:
FREQUENCY CHARACTERISTICS MEASURING METHOD AND DEVICE FOR ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2003/087850
Kind Code:
A1
Abstract:
A metal bar (1) supported by a metal bar guide (30) so as to be tiltable at a proper angle is momentarily freed to be kept in a free fall condition, a missile (3) kept at the same angle as that of the metal bar is allowed to impinge to one end surface (2) of the metal bar during the freed period to generate and propagate an elastic wave pulse inside the metal bar, acceleration produced when the elastic wave pulse is reflected off the other end surface (22) of the metal bar is detected by a dc acceleration sensor (23), strain and motion at the end surface are measured by strain gages (25) provided on the side surface and/or by a laser interferometer (24), respective measurements are computed, the frequency response of the dc acceleration sensor is determined, and the frequency characteristics of the dc acceleration sensor are measured.
More Like This:
Inventors:
UMEDA AKIRA (JP)
Application Number:
PCT/JP2003/004132
Publication Date:
October 23, 2003
Filing Date:
March 31, 2003
Export Citation:
Assignee:
NAT INST OF ADVANCED IND SCIEN (JP)
UMEDA AKIRA (JP)
UMEDA AKIRA (JP)
International Classes:
H05B33/10; G01N3/30; G01N3/62; G01P15/08; G01P15/097; G01P21/00; G09F9/00; G09F9/30; H01L21/336; H01L23/12; H01L27/32; H01L29/786; H01L51/50; H05B33/14; (IPC1-7): G01P21/00
Foreign References:
| US5000030A | 1991-03-19 | |||
| JPH05273232A | 1993-10-22 | |||
| JPH03109165U | 1991-11-08 |
Attorney, Agent or Firm:
Fukuda, Kenzo (6-13 Nishishinbashi 1-chom, Minato-ku Tokyo, JP)
Download PDF: