Title:
FREQUENCY TRANSFORM PHASE SHIFTING INTERFEROMETRY
Document Type and Number:
WIPO Patent Application WO2002012825
Kind Code:
A9
Abstract:
The invention features methods and systems in which wavelength-tune PSI data is analyzed in the frequency domain to produce spectrally separated frequency peaks each corresponding to a particular pair of surfaces in an interferometric cavity defined by multiple pairs of surfaces. Each frequency peak provides optical path length information about a corresponding pair of surfaces in the cavity. As a result, the interferometric data from such cavities provides simultaneous information about multiple surfaces.
Inventors:
DECK LESLIE L (US)
Application Number:
PCT/US2001/024467
Publication Date:
April 03, 2003
Filing Date:
August 02, 2001
Export Citation:
Assignee:
ZYGO CORP (US)
DECK LESLIE L (US)
DECK LESLIE L (US)
International Classes:
G01B9/02; G01B11/06; G01B11/24; (IPC1-7): G01B9/02; G01B11/06; G01B11/30
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