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Title:
FUNCTIONAL ELEMENT AND MANUFACTURING METHOD OF SAME
Document Type and Number:
WIPO Patent Application WO/2023/157571
Kind Code:
A1
Abstract:
In the present invention, a method for manufacturing a functional element comprises: preparing a substrate in which a first electrode and a second electrode are exposed on the top surface; forming a first film above the substrate across a gap provided for exposing at least a portion of the top surface of the first electrode; forming a second film using an application method on the first electrode, the second electrode, and the first film; exposing the top surface of the first electrode by removing a portion of the second film above the first electrode; and forming an electrical contact 15 on the top surface of the first electrode.

Inventors:
YAMAOKA YOSHIKAZU
MACHIDA SHINICHI
SHISHIDO SANSHIRO
Application Number:
PCT/JP2023/001942
Publication Date:
August 24, 2023
Filing Date:
January 23, 2023
Export Citation:
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Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
H01L27/146
Domestic Patent References:
WO2019239851A12019-12-19
WO2011027745A12011-03-10
WO2018016213A12018-01-25
Foreign References:
JP2015012239A2015-01-19
Attorney, Agent or Firm:
KAMATA Kenji et al. (JP)
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