Title:
GAP-FILLING MEMBER
Document Type and Number:
WIPO Patent Application WO/2021/084838
Kind Code:
A1
Abstract:
Provided is a novel gap-filling member with a laminated structure that is hardly delaminated by heat. When a plurality of target members are placed on the surface side of the substrate of a sputtering target (will be simply referred to as "substrate"), a gap-filling member is interposed between the target members and the substrate along gaps formed between adjacent targets. The gap-filling member is characterized by having a multilayered structure including at least three layers in the thickness direction, the multilayered structure including an intermediate layer between a layer on the target member side (also referred to as "front face layer") and a layer on the substrate side (also referred to as "reverse face layer"), the intermediate layer being made of a material having a linear expansivity between the linear expansivity of the material of the front face layer and the linear expansivity of the material of the reverse face layer.
Inventors:
YANO TOMOYASU (JP)
UCHIDA TATSUHIKO (JP)
TERAMURA KYOSUKE (JP)
HIROFUJI KENTARO (JP)
UCHIDA TATSUHIKO (JP)
TERAMURA KYOSUKE (JP)
HIROFUJI KENTARO (JP)
Application Number:
PCT/JP2020/030212
Publication Date:
May 06, 2021
Filing Date:
August 06, 2020
Export Citation:
Assignee:
MITSUI MINING & SMELTING CO (JP)
International Classes:
C23C14/34
Foreign References:
| JP2015004116A | 2015-01-08 | |||
| JP2019104964A | 2019-06-27 | |||
| US20060272941A1 | 2006-12-07 |
Attorney, Agent or Firm:
TAKEUCHI, ICHIZAWA & ASSOCIATES (JP)
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