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Title:
GAS DELIVERY ASSEMBLY AND GAS-PHASE REACTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/067380
Kind Code:
A1
Abstract:
The present invention provides a gas delivery assembly and a gas-phase reaction device. The gas delivery assembly comprises an internal gas delivery assembly located in the middle area of the gas delivery assembly and a peripheral gas delivery assembly surrounding the middle area; the peripheral gas delivery assembly comprises a plurality of tubular channels and at least one annular groove; the annular groove is communicated with the tubular channels for gas in the tubular channels to flow out; there is an angle φ between the projection of a tube axis of at least part of each tubular channel on a tangent plane where the endpoint of the tube axis at the joint of the tubular channel and the annular groove is located and a main axis of the gas delivery assembly, wherein φ is not 0, so that the gas flowing out of the peripheral gas delivery assembly forms a rotating airflow, and the rotation direction of the rotating airflow is consistent with the rotation direction of a bearing disc in a reaction process. The rotating airflow reduces the relative velocity of a middle flow field airflow and an edge flow field airflow in a reaction chamber, thereby suppressing or completely eliminating the generation of eddy currents in the reaction chamber.

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Inventors:
XING ZHIGANG (CN)
ZHANG ZHIMING (CN)
LIU LEI (CN)
Application Number:
PCT/CN2023/120572
Publication Date:
April 04, 2024
Filing Date:
September 22, 2023
Export Citation:
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Assignee:
CHUYUN TEK SHANGHAI CO LTD (CN)
International Classes:
C23C16/455; C23C16/458; H01L21/67
Foreign References:
CN115572958A2023-01-06
CN108103479A2018-06-01
CN105200395A2015-12-30
CN107447205A2017-12-08
CN105441904A2016-03-30
CN114164412A2022-03-11
US20150176126A12015-06-25
JP2019075516A2019-05-16
Attorney, Agent or Firm:
J.Z.M.C. PATENT AND TRADEMARK LAW OFFICE (GENERAL PARTNERSHIP) (CN)
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