Title:
GAS DETERMINATION DEVICE, GAS DETERMINATION METHOD, AND GAS DETERMINATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/040050
Kind Code:
A1
Abstract:
This gas determination method determines gas using a sensor having a field-effect transistor structure including: a gate electrode; an insulating film formed on the gate electrode; a source electrode and a drain electrode which are formed on the insulating film; and a graphene layer formed on the insulating film and connecting the source electrode and the drain electrode. The gas determination method comprises: supplying gas to the graphene layer; applying a first voltage to the gate electrode for a predetermined period of time; measuring a change in a first current flowing between the source electrode and the drain electrode when a sweep voltage is applied to the gate electrode, the sweep voltage varying in a range of between the first voltage and a second voltage differing from the first voltage; measuring a change in a second current flowing between the source electrode and the drain electrode when the second voltage is applied to the gate electrode for a predetermined period of time and the sweep voltage is applied to the gate electrode; and determining the type or the concentration of the gas on the basis of a result of the measurement of the change in the first current with respect to the sweep voltage and a result of the measurement of the change in the second current with respect to the sweep voltage.
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Inventors:
MURUGANATHAN MANOHARAN (JP)
AGBONLAHOR GABRIEL (JP)
MIZUTA HIROSHI (JP)
SHIMOMAI KENICHI (JP)
HATTORI MASASHI (JP)
ONDA YOSUKE (JP)
AGBONLAHOR GABRIEL (JP)
MIZUTA HIROSHI (JP)
SHIMOMAI KENICHI (JP)
HATTORI MASASHI (JP)
ONDA YOSUKE (JP)
Application Number:
PCT/JP2020/032957
Publication Date:
March 04, 2021
Filing Date:
August 31, 2020
Export Citation:
Assignee:
TAIYO YUDEN KK (JP)
International Classes:
G01N27/00
Domestic Patent References:
| WO2016021693A1 | 2016-02-11 | |||
| WO2017002854A1 | 2017-01-05 |
Foreign References:
| JP2011185818A | 2011-09-22 | |||
| JP2009250633A | 2009-10-29 | |||
| US20180180573A1 | 2018-06-28 | |||
| US20140260547A1 | 2014-09-18 |
Other References:
INABA ET AL.: "Ammonia gas sensing using a graphene field-effect transistor gated by ionic liquid", SENSORS AND ACTUATORS B: CHEMICAL, vol. 195, May 2014 (2014-05-01), pages 15 - 21, XP028626520, DOI: 10.1016/j.snb.2013.12.118
Attorney, Agent or Firm:
OMORI, Junichi (JP)
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