Title:
GAS FLOW RATE ESTIMATION METHOD, HOLE DIAMETER ESTIMATION METHOD, GAS FLOW RATE ESTIMATION DEVICE, AND HOLE DIAMETER ESTIMATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/079833
Kind Code:
A1
Abstract:
In this gas flow rate estimation method, regardless of the flow state of a gas, the flow rate of the gas is determined from the molecular weight, viscosity coefficient, and specific heat ratio of the gas, the diameter and length of a hole, and the pressures upstream and downstream from the hole on the basis of a predetermined relational expression including, as parameters: the flow rate of the gas; the diameter and length of the hole; the upstream and downstream pressures; and the temperature, molecular weight, viscosity coefficient, and specific heat ratio of the gas. Additionally, in this invention, set conditions for the type and temperature of the gas, the length of the hole, and the pressures upstream and downstream from the hole are determined; the relational expression is used to determine the correspondence relationship between the diameter of the hole and the flow rate of the gas flowing through the hole; an approximation function approximating the determined correspondence relationship is determined; the flow rate of a gas passing through a test body having a hole of an unknown diameter is measured; and the diameter of the hole is measured on the basis of the measured flow rate and the approximation function.
Inventors:
YOSHIDA HAJIME (JP)
TAKEI YOSHINORI (JP)
ARAI KENTA (JP)
HIRATA MAO (JP)
HARA TSUTOMU (JP)
INOMATA JUN (JP)
TAKEI YOSHINORI (JP)
ARAI KENTA (JP)
HIRATA MAO (JP)
HARA TSUTOMU (JP)
INOMATA JUN (JP)
Application Number:
PCT/JP2020/039118
Publication Date:
April 29, 2021
Filing Date:
October 16, 2020
Export Citation:
Assignee:
AIST (JP)
FUKUDA CO LTD (JP)
FUKUDA CO LTD (JP)
International Classes:
G01F1/34; G01B13/10; G01F1/00; G01M3/00
Foreign References:
| JP2004020524A | 2004-01-22 | |||
| JP2003270077A | 2003-09-25 |
Other References:
R.G. LIVESEY: "Method for calculation of gas flow in the whole pressure regime through ducts of any length", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, vol. 19, 2001, pages 1674, XP012005694, DOI: 10.1116/1.1345895
R.G. LIVESEY: "Solution methods for gas flow in ducts through the whole pressure regime", VACUUM, vol. 76, 29 October 2004 (2004-10-29), pages 101 - 107, XP004595663, DOI: 10.1016/j.vacuum.2004.05.015
DONALD J. SANTELER: "New concepts in molecular gas flow", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, vol. 4, 1986, pages 338 - 343
See also references of EP 4050307A4
R.G. LIVESEY: "Solution methods for gas flow in ducts through the whole pressure regime", VACUUM, vol. 76, 29 October 2004 (2004-10-29), pages 101 - 107, XP004595663, DOI: 10.1016/j.vacuum.2004.05.015
DONALD J. SANTELER: "New concepts in molecular gas flow", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, vol. 4, 1986, pages 338 - 343
See also references of EP 4050307A4
Attorney, Agent or Firm:
TAMBA Masataka et al. (JP)
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