Title:
GAS LASER DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/215227
Kind Code:
A1
Abstract:
A gas laser device (5010) has: electrodes (304, 305, 308, 309) that give, through discharge, a gain to laser gas enclosed in a casing (301) and generate a discharge space in which laser light passing therein multiple times is amplified; an exit-side shielding member (11) having an opening (101) formed therein, through which the laser light that has passed through the discharge space passes in an out-bound direction, and the laser light passes in an in-bound direction, which is the opposite direction from the out-bound direction, and then enters the discharge space again; and a mirror plate (511) having a mirror reflective surface (5111) reflecting the laser light that has propagated in the out-bound direction, toward the in-bound direction at a reflection angle larger than 0°. The reflectance of the mirror reflective surface (5111) is uniform, and the diameter of the mirror reflective surface (5111) is smaller than the diameter of the first opening (101).
Inventors:
YAMAMOTO TATSUYA (JP)
TADOKORO YUZURU (JP)
NISHIMAE JUNICHI (JP)
TADOKORO YUZURU (JP)
NISHIMAE JUNICHI (JP)
Application Number:
PCT/JP2021/014895
Publication Date:
October 13, 2022
Filing Date:
April 08, 2021
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
H01S3/034
Domestic Patent References:
| WO2015008405A1 | 2015-01-22 | |||
| WO2012176252A1 | 2012-12-27 |
Foreign References:
| JPH05102560A | 1993-04-23 | |||
| JPH02302083A | 1990-12-14 | |||
| JPS5853875A | 1983-03-30 | |||
| JPH0856027A | 1996-02-27 | |||
| JP2007096063A | 2007-04-12 | |||
| US4023119A | 1977-05-10 |
Attorney, Agent or Firm:
TAKAMURA, Jun (JP)
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