GAS PHASE GROWTH DEVICE WITH RAISING AND LOWERING MECHANISM

Title:

GAS PHASE GROWTH DEVICE WITH RAISING AND LOWERING MECHANISM

Document Type and Number:

WIPO Patent Application WO/2012/120970

Kind Code:

A1

Abstract:

This gas phase growth device is provided with a raising and lowering mechanism for a gas outflow unit (14) that forcibly stops the rotation of ball screws (22) that raise the gas outflow unit (14). The gas phase growth device is provided with a plurality of belt breakage detection sensors (28, 29, 30, 31) for all timing belts (27) that connect the plurality of ball screws (22) to each other via shafts (21) on the gas outflow unit (14) and also connect each of the ball screws (22) and a motor (26).

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Inventors:

KODAMA MASAAKI
KOJIMA HIROMUTSU

Application Number:

PCT/JP2012/053118

Publication Date:

September 13, 2012

Filing Date:

February 10, 2012

Export Citation:

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Assignee:

SHARP KK (JP)
KODAMA MASAAKI
KOJIMA HIROMUTSU

International Classes:

H01L21/205; C23C16/455

Foreign References:

JP2004311887A	2004-11-04
JP2002184761A	2002-06-28
JP2011192912A	2011-09-29

Attorney, Agent or Firm:

Fukami Patent Office, p. c. (JP)
Patent business corporation Fukami patent firm (JP)

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