GAS SENSOR

WIPO Patent Application WO/2022/030932

A1

The present invention relates to a gas sensor. The present invention provides a gas sensor comprising: an insulator substrate having a sensing portion, the sensing portion having an island portion, a support portion surrounding the island portion, and an opening formed such that a pair of leg portions are formed so as to connect the island portion and the support portion; a heater pattern formed on a surface of the island portion; an electrode pattern connected to the heater pattern and configured to extend through the leg portions; and a sensing layer formed on at least one of the surface of the island portion, on which the heater pattern is formed, and the opposite surface thereof. In connection with the gas sensor according to the present invention, the island portion on which the heater pattern and the sensing layer are formed is connected to the support portion by the thin leg portions, the remaining portion of the island portion is separated from the support portion by the opening, and the island portion and the sensing portion are accordingly heated quickly by heating of the heater pattern. Therefore, same has the advantage of a higher response rate than conventional gas sensors.

YOO DO JOON (KR)
JUNG JONG JIN (KR)
KIM YONG (KR)

PCT/KR2021/010111

February 10, 2022

August 03, 2021

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SENTECH KOREA CORP (KR)

G01N27/16; G01N27/12

JP2011153996A	2011-08-11
KR19990071998A	1999-09-27
KR101481659B1	2015-01-12
KR101947047B1	2019-02-12
JPH0875691A	1996-03-22

DYNE PATENT & LAW FIRM (KR)

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