Title:
GAS SUPERHEATER AND SUPERHEATER CONNECTING BODY
Document Type and Number:
WIPO Patent Application WO/2012/105414
Kind Code:
A1
Abstract:
[Problem]
To provide a gas superheater and a gas superheater connecting body with which a corrosive and reactive gas, and particularly a raw material silicon tetrachloride gas in a zinc reduction method that manufactures high-purity silicon, can be strictly controlled and heated to a target temperature of 900-1,100°C.
[Solution]
A gas superheater characterized in that multiple heat-generating tubes housing heat-generating bodies are arranged in the lengthwise direction within an outer cylindrical tube equipped with a gas inflow port and a gas outflow port.
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Inventors:
TAKEDA YOSHITO (JP)
TANAKA HIROTO (JP)
TANAKA HIROTO (JP)
Application Number:
PCT/JP2012/051697
Publication Date:
August 09, 2012
Filing Date:
January 26, 2012
Export Citation:
Assignee:
JNC CORP (JP)
JX NIPPON MINING & METALS CORP (JP)
TOHO TITANIUM CO LTD (JP)
TAKEDA YOSHITO (JP)
TANAKA HIROTO (JP)
JX NIPPON MINING & METALS CORP (JP)
TOHO TITANIUM CO LTD (JP)
TAKEDA YOSHITO (JP)
TANAKA HIROTO (JP)
International Classes:
F27D7/02; F27D11/02; H05B3/12; H05B3/14; H05B3/40; C01B33/107
Foreign References:
| JPH0621242U | 1994-03-18 | |||
| JPH0623242U | 1994-03-25 | |||
| JPH0835724A | 1996-02-06 | |||
| JP2008082655A | 2008-04-10 | |||
| JPH05254810A | 1993-10-05 | |||
| JP2002083672A | 2002-03-22 | |||
| JPH0338980U | 1991-04-15 |
Attorney, Agent or Firm:
SSINPAT PATENT FIRM (JP)
Patent business corporation SSINPAT (JP)
Patent business corporation SSINPAT (JP)
Download PDF:
Claims:
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