Title:
GASEOUS FLOW SENSOR AND RELATED METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2014/011277
Kind Code:
A3
Abstract:
A gas flow sensing device, and related method of manufacturing, comprising a conductive layer encapsulated in dielectric film, suspended over a cavity to form a diaphragm. The conductive layer functions as both a heating a sensing element and is patterned to provide uniform heat distribution across the diaphragm. The device is designed to sense flow from any direction relative to the device and the design of the dielectric film and diaphragm reduces sensor drift during prolonged operation.
Inventors:
ZHU JIANZHONG (US)
BART-SMITH HILARY (US)
CHEN ZHENG (US)
BART-SMITH HILARY (US)
CHEN ZHENG (US)
Application Number:
PCT/US2013/036109
Publication Date:
March 20, 2014
Filing Date:
April 11, 2013
Export Citation:
Assignee:
UNIV VIRGINIA PATENT FOUND (US)
ZHU JIANZHONG (US)
BART-SMITH HILARY (US)
CHEN ZHENG (US)
ZHU JIANZHONG (US)
BART-SMITH HILARY (US)
CHEN ZHENG (US)
International Classes:
G01F1/56
Foreign References:
| US20020100316A1 | 2002-08-01 | |||
| US20090158859A1 | 2009-06-25 | |||
| US6762113B2 | 2004-07-13 | |||
| US20060243064A1 | 2006-11-02 | |||
| US20100078753A1 | 2010-04-01 | |||
| US5998816A | 1999-12-07 | |||
| US20030092203A1 | 2003-05-15 | |||
| US20020074314A1 | 2002-06-20 | |||
| US20110266521A1 | 2011-11-03 | |||
| US6378365B1 | 2002-04-30 | |||
| US6153360A | 2000-11-28 |
Other References:
See also references of EP 2836800A4
Attorney, Agent or Firm:
DECKER, Robert J. (Suite 300Charlottesville, Virginia, US)
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