GRANULAR THIN MAGNETIC FILM AND METHOD OF MANUFACTURING THE FILM, LAMINATED MAGNETIC FILM, MAGNETIC PART, AND ELECTRONIC DEVICE

Title:

GRANULAR THIN MAGNETIC FILM AND METHOD OF MANUFACTURING THE FILM, LAMINATED MAGNETIC FILM, MAGNETIC PART, AND ELECTRONIC DEVICE

Document Type and Number:

WIPO Patent Application WO/2002/058086

Kind Code:

A1

Abstract:

A thin magnetic film utilizing a granular film to provide excellent high frequency characteristics and a method of manufacturing the magnetic film, a laminated magnetic film, and a magnetic part and an electronic device utilizing the laminated magnetic film, wherein, by a non-reactive spattering, the oxidation of magnetic material is eliminated and a saturation magnetization is increased to increase the resonance frequency of a permeability, the size of magnetic particles and the thickness of insulation layers in a granular structure formed of the magnetic particles and the insulation layers are optimized by the combination of a multiple simultaneous spattering with the non-reactive spattering to provide a proper magnitude of a crystal magnetic anisotropy in the particles so as to provide excellent soft magnetic characteristics, and a resistivity is increased by optimizing the thickness of the insulation layers to reduce an eddy current so as to improve an exchange interaction between the magnetic particles.

Inventors:

KOBAYASHI KAZUYOSHI (JP)
IKEDA KENJI (JP)
FUJIMOTO MASAYUKI (JP)

Application Number:

PCT/JP2002/000278

Publication Date:

July 25, 2002

Filing Date:

January 17, 2002

Export Citation:

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Assignee:

TAIYO YUDEN KK (JP)
KOBAYASHI KAZUYOSHI (JP)
IKEDA KENJI (JP)
FUJIMOTO MASAYUKI (JP)

International Classes:

H01F10/00; H01F10/32; H01F41/18; H01F41/30; H05K9/00; H01F10/13; (IPC1-7): H01F10/20; H01F41/18

Foreign References:

JPH10270246A	1998-10-09
JP2000340425A	2000-12-08
JPH0950618A	1997-02-18
JP2000150233A	2000-05-30

Other References: