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Title:
GRINDING COMPOSITION AND USE THEREOF
Document Type and Number:
WIPO Patent Application WO/2022/070801
Kind Code:
A1
Abstract:
Provided is a novel grinding composition suited to grinding. The grinding composition contains a basic compound and water. The grinding composition further contains a surfactant having two hydrophilic bases and two hydrophobic bases in the molecule.

Inventors:
GOTO OSAMU (JP)
TAKAMA DAIKI (JP)
TSUCHIYA KOHSUKE (JP)
MORI YOSHIO (JP)
Application Number:
PCT/JP2021/032804
Publication Date:
April 07, 2022
Filing Date:
September 07, 2021
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Assignee:
FUJIMI INC (JP)
International Classes:
C09K3/14; B24B37/00; H01L21/304
Foreign References:
JP2020105095A2020-07-09
JP2011162614A2011-08-25
JP2006502579A2006-01-19
JP2017527654A2017-09-21
JP2008135746A2008-06-12
Attorney, Agent or Firm:
ABE, Makoto (JP)
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