Title:
GRINDING PAD
Document Type and Number:
WIPO Patent Application WO/2016/047451
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a grinding pad that, although being structured such that the back surface of a window is adhered to an adhesive member, is capable of performing high-accuracy optical final point sensing. The grinding pad comprises a grinding layer including a grinding region and a light transmitting region, and a support layer including an opening portion, the layers being laminated via an adhesive member with the light transmitting region and the opening portion overlapping each other, and is characterized in that the back surface of the adhesive member in the opening portion has an arithmetic mean roughness Ra of not more than 1 μm.
Inventors:
NAKAMURA KENJI (JP)
Application Number:
PCT/JP2015/075714
Publication Date:
March 31, 2016
Filing Date:
September 10, 2015
Export Citation:
Assignee:
TOYO TIRE & RUBBER CO (JP)
International Classes:
H01L21/304; B24B37/013; B24B37/22
Foreign References:
| JP2014094424A | 2014-05-22 | |||
| JP2004260156A | 2004-09-16 |
Attorney, Agent or Firm:
UNIUS PATENT ATTORNEYS OFFICE (JP)
Patent business corporation ユニアス international patent firm (JP)
Patent business corporation ユニアス international patent firm (JP)
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